Dynamics of Polysilicon Parallel-plate Electrostatic Actuators
نویسندگان
چکیده
The response of a polysilicon parallel-plate electrostatic actuator to AC signals at diierent bias voltages has been measured with a laser interferometer. Using microhinges, large plates (with areas from 100m 2 to 0:1mm 2) with long thin support beams (such as 60031:5m 3) are rotated oo the surface of the substrate to form a parallel-plate capacitor. Fabricated structures having 100m gaps can be closed electrostatically with voltages as low as 50V. This new actuator is estimated to output a force of up to 50N. With the exception of the resonant Q, the experimental results are in good agreement with simulations based on a simple nonlinear model for the actuator.
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